| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature controller 1 capable of lowering the temperature of a sample plate 8 abruptly. SOLUTION: In the temperature controller 1 capable of heating a sample mounting portion 8 provided on a heat plate 6 equipped with a heater 16, a cold plate 9 for cooling the sample mounting portion 8 is provided, and a means 30 for switching the level of heat exchange with the heat plate 6 is provided. COPYRIGHT: (C)2006,JPO&NCIPI
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