METHOD AND DEVICE FOR GENERATING X RAY

摘要

PROBLEM TO BE SOLVED: To provide a method for generating a X ray (including EUV light), whereby generation of debris can be effectively suppressed.

SOLUTION: This method of generating the X ray is provided with a process in which a target separating laser beam 19 is irradiated to a X ray generating target 13 deposited on the surface of a transparent substrate 11 directly or through a laser absorbing layer from the rear surface side of the substrate, the target 13 is thereby separated from the substrate 11, and X ray generating energy 23 is supplied to the separated target 13, in order to generate the X ray.

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