| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical reaction apparatus to be made further compact and thin by using a relatively economical substrate material and accomplishing good joint state by simple production process and a portable type power source system using the chemical reaction apparatus. <P>SOLUTION: The chemical reaction apparatus (microreactor) has a mutually layered and bonded structure composed of a main substrate 10 such as glass (SiO<SB>2</SB>) in which reaction channels 11 having a prescribed width and depth in one face side, an auxiliary substrate 20 such as glass (SiO<SB>2</SB>) set face to face to the one face side of the main substrate 10 and having a thin film heater 30 having a prescribed plane shape and formed in the other face side, a joining oxide film 21a of tantalum silicide (TaSi) formed between the main substrate 10 and the auxiliary substrate 20. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
