| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heated member for high frequency heating that can be used without limitation in the atmosphere, and the high frequency heating device equipped with it. <P>SOLUTION: This is the heated member for the high frequency composed of a sintered body of silicon carbide in which content of metal impurities is 1 ppm or less based on the total weight. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
