| 摘要 |
PROBLEM TO BE SOLVED: To automatically and efficiently detect parallelism between pressing faces of a pressing tool and a pressure bonding base by automatically inserting a pressure measuring film between the pressing faces, moving the pressure measuring film pressed between the pressing faces to an imaging position, and imaging the pressure measuring film with an imaging device. SOLUTION: An unpressed part of the pressure measuring film 23 is automatically let out to a position of use 24 by an automatic film rewinding device 25. The unpressed part let out to the position of use is moved to a pressing position 26 between the pressing faces 17 and 18 of the pressing tool 15 and the pressure bonding base 16. A pressed part of the measuring film pressed between the pressing faces is moved to the imaging position 27 and imaged by the imaging device 28. Information on pickup images of the pressed part of the measuring film pressed between the pressing faces is outputted to an output device 53. COPYRIGHT: (C)2006,JPO&NCIPI
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