HEAT ELECTROMAGNETIC RADIATION DETECTOR HAVING ABSORPTION FILM FIXED IN STATE OF SUSPENSION

摘要

PROBLEM TO BE SOLVED: To provide a detector which keeps radiation sensing surface of a bolometer at a high ratio to the entire bolometer surface while simplifying manufacturing process, and its manufacturing process. SOLUTION: An absorption film (1) of the detector is fixed to the surface of a substrate (2) by at least one heat insulation supporting component (5ab) in a state of suspension. The substrate (2) includes at least two electrical connection terminals (3) electrically connected to the film (1) by a conductive layer (9), for example. The supporting component (5ab) has at least one base end (6) and a prominence region (7). The base end (6) is fixed above a conductive pillar (8) and the pillar (8) has a base fixed to one of the electrical connection terminals (3). A substantially flat region of a bottom of the film (1) directly comes in contact with the prominence region (7) of the supporting component (5ab). The supporting component (5ab) is preferably formed by a bridge having a second base end (6) fixed above a second pillar (8) and the prominence region (7) is formed by a flat central part of the bridge. COPYRIGHT: (C)2006,JPO&NCIPI