| 摘要 |
PROBLEM TO BE SOLVED: To provide a power supply device that is small, lightweight, inexpensive, and capable of generating high power, a stage device, and an aligner. SOLUTION: A driver 22 alternately turns on and off FET1 and FET2 at a high frequency, and thereby transfers electric charge stored in a capacitor C3 to a capacitor C2. Thus, the output voltage of the power supply device becomes equal to twice (560 V) 280 V obtained by rectifying three-phase alternating-current 200 V. In addition, since the FET1 and the FET2 are turned on and off at a high frequency, the capacity of the capacitor C2 can be reduced. COPYRIGHT: (C)2006,JPO&NCIPI
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