| 发明名称 |
MEMS switches with deforming membranes |
| 摘要 |
MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. In some embodiments, the application of a voltage opens switch contacts.
|
| 申请公布号 |
US2006067648(A1) |
申请公布日期 |
2006.03.30 |
| 申请号 |
US20050198925 |
申请日期 |
2005.08.05 |
| 申请人 |
CHUI CLARENCE;KOTHARI MANISH |
发明人 |
CHUI CLARENCE;KOTHARI MANISH |
| 分类号 |
G02B6/00 |
主分类号 |
G02B6/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
