摘要 |
A thin film transistor array panel is provided, which includes a substrate having a display area and driver, a polysilicon layer formed on the substrate and including channel, source, and drain regions, and lightly doped regions disposed between the channel region and the source and drain regions, and having an impurity concentration lower than the source and the drain regions, a gate insulating layer formed on the polysilicon layer, an impurity layer formed on the gate insulating layer and overlapping the channel region of the polysilicon layer and doped with impurities, a gate electrode formed on the impurity layer, an interlayer insulating layer covering the gate electrode and having first and second contact holes respectively exposing the source and drain regions, and source and drain electrodes respectively connected to the source and drain regions via the first and the second contact holes.
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