| 摘要 |
A semiconductor device includes an SiC substrate, a normal direction of the substrate surface being off from a <0001> or <000-1> direction in an off direction, an SiC layer formed on the SiC substrate, a junction forming region formed in a substantially central portion of the SiC layer, a junction termination region formed to surround the junction forming region, and including a semiconductor region of a conductivity type different from the SiC layer formed as a substantially quadrangular doughnut ring, having two edges facing each other, each crossing a projection direction, which is obtained when the off direction is projected on the upper surface of the SiC layer, at a right angle, wherein a width of one of the two edges on an upper stream side of the off direction is L 1 , that of the other edge on a down stream side is L 2 , and a relation L 1> L 2 is satisfied.
|
