| 摘要 |
PROBLEM TO BE SOLVED: To enhance stacked accuracy of a device by eliminating an error of a component itself in regard to a component stacked accuracy evaluation method for the device. SOLUTION: In evaluation of component stacked accuracy in the device stacking and joining a stacked side component on a component held on a component receiving part 1, after holding a component model 4 attached with a position indicating mark 3 on a size reference face 2 set on the component in the component receiving part 1 in place of the component, a stacked side component model 5 attached with a position indicating mark 3 on a superposition face with the size reference face 2 is stacked on the component model 4 in place of the stacked side component, a relative position of the position indicating mark 3 in the superposition face is observed from a side of one of the component models 4 and 5 formed to allow seeing of the size reference face 2, and the component stacked accuracy of the device is evaluated from an observation result. COPYRIGHT: (C)2006,JPO&NCIPI
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