| 摘要 |
PROBLEM TO BE SOLVED: To easily performing processing and positioning of a guide rail following the enlargement of a stage device. SOLUTION: The guide rail 30 of the stage guide mechanism 28 has a substantially square cross section and is mounted to a horizontal face so that four sides produce a tilt angle of 45°. An adjusting mechanism 36 comprises a pair of adjusting blocks 50 and 51 for pressing the lower tilt surfaces 30a and 30b of the guide rail 30 from both sides, a bolt 52 for fixation for fixing the adjusting block 50 to the upper face (horizontal face) of a base 14, an adjusting screw 54 for adjusting the mounting position by pressing the adjusting block 50 from a side, and a fastening bolt 56 that is screwed to the adjusting blocks 50 and 51 and fastens the adjusting blocks 50 and 51 to the guide rail 30. The adjustment can be performed by the adjusting mechanism 36 so as to eliminate the distortion of the guide rail 30 after installing the stage device 10. COPYRIGHT: (C)2006,JPO&NCIPI
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