| 摘要 |
PROBLEM TO BE SOLVED: To accurately determine thickness and surface height of a transparent film of a measured object covered with the transparent film, and surface height of the measured object. SOLUTION: At least one of the thickness of a transparent film of a measured object covered with the transparent film, the surface height thereof, and the surface height of the measured object is determined, using a calculation algorithm for determining the thickness and surface height of the transparent film on the basis of a previously determined physical model of an interference pattern and the direct current component, the amplitude of the sine element, and the amplitude of the cosine element of the interference pattern waveform determined using a plurality of strength values in each pixel on the basis of an actually obtained strength value of the interference pattern. COPYRIGHT: (C)2006,JPO&NCIPI
|
