| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape measuring method and surface shape measuring device that are suitable for manufacturing a display device such as a flat panel display, and can alternatively, speedily detect a defect of an irregular shape on a substrate face, namely a recessed shape or a projecting shape. SOLUTION: Reference data acquired in a positional relation where a relative positional relation between an objective lens 2 and the substrate 1 face does not cause an interference on the substrate 1 face in a white two-beam interference method is compared with measurement data acquired in a positional relation where a relative positional relation between the substrate 1 face and the objective lens 2 causes an interference in an observed object part. Thus, the observed object part to be observed is detected without the conventional scan of the objective lens 2 in the Z axis direction. COPYRIGHT: (C)2006,JPO&NCIPI
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