| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an improved system and method for controlling fluid temperature and fluid pressure as well as a fluid route determination system for promptly and accurately changing the fluid temperature. <P>SOLUTION: This is a method for controlling set value pressure of at least one regulator. This method includes a process for applying fluid to a pressure set value port of at least one regulator, a process for exhausting the fluid into the atmosphere from the pressure set value port, and a process for controlling the applying process and the exhausting process in order to set the set value pressure to be predetermined pressure. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
