| 摘要 |
PROBLEM TO BE SOLVED: To position a workpiece by preventing occurrence of particles. SOLUTION: The workpiece positioning device simultaneously positions glass plates 31 respectively arranged in a plurality of pockets 34 of a workpiece regulation stage. An X-axis reference surface 34x and a Y-axis reference surface 34y for positioning are formed on the side surface of the pocket 34. The glass plate 31 is floated by the air from an air jetting hole 35 formed on the bottom surface of the pocket 34. The glass plate 31 is positioned and fixed by sucking the air from a vacuum suction hole 36 formed on the bottom surface of the pocket 34. The workpiece regulation stage is so tilted that the X-axis reference surface 34x and the Y-axis reference surface 34y comes to be in lower position, so that the floating glass plate 31 is shifted and made to abut with the X-axis reference surface 34x and the Y-axis reference surface 34y sides in a regulation stage tilting device. COPYRIGHT: (C)2006,JPO&NCIPI |
