| 摘要 |
PROBLEM TO BE SOLVED: To improve the precision of an orifice part which allows a liquid flowing into the recessed part of a substrate provided with a pressure generating means to pass therethrough, thereby reducing fluctuation in the resistance of the fluid to enhance the precision. SOLUTION: An auxiliary partition wall 48 is provided between the substrate 43 and a nozzle plate 41, and a pressurizing liquid chamber 46 for pressurizing liquid is consisted of the auxiliary partition wall 48 and a recessed part 43a. An orifice part 40 is constituted of a space part which is formed between the surface of a non-recessed part 43b where the recessed part 43a of the auxiliary partition wall 48 and the substrate 43 is not formed or a thin film diaphragm 54 covering the surface of the non-recessed part, and the inner surface of the nozzle plate 41. Thereby, the fluctuation in the precision of the orifice part in a manufacturing process can be reduced, as compared with the case where the orifice part is formed on the substrate 43 in a grooved recessed part. Furthermore, the orifice part 40 thus constituted can suppress increase in fluid resistance in the pressurizing liquid chamber without increasing difficulty in manufacturing process. COPYRIGHT: (C)2006,JPO&NCIPI
|
