| 摘要 |
PROBLEM TO BE SOLVED: To realize a transfer system capable of minimizing a space occupied by a transfer means of a work and reducing system construction cost. SOLUTION: A pair of X-axis linear motors to move sliders in the X-axis direction are arranged in parallel, a Y-axis linear motor is provided on a bridge member bridged between the sliders of the pair of X-axis linear motors, positioning stages 101, 102, 103 to carry out predetermined processing on the works 2, 2', 2'' by using tools loaded on a slider of the Y-axis linear motor are furnished and the plurality of positioning stages are connected to one another. COPYRIGHT: (C)2006,JPO&NCIPI
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