| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro mechanical device using a piezoelectric driving actuator capable of controlling a displacement amount with high re-productivity and accuracy. <P>SOLUTION: This device has a first piezoelectric membrane 26, a first lower electrode 22 and a first upper electrode 32 which sandwich the first piezoelectric membrane 26, a first beam 40 extending from a fixed edge 44 fixed on a substrate 10 to a connecting edge 52, a second piezoelectric membrane 28 connected with the first piezoelectric membrane 26 at the connecting edge 52, a second lower electrode 24 and a second upper electrode 34 which sandwich the second piezoelectric membrane 28, a second beam 42 extending from the connecting edge 52 to an action edge 48, and a fixed electrode 16 disposed facing the action edge 48 on the surface of the substrate 10. Respective center-to-center distances of the fixed edge 44 and the action edge 48 are shorter than a distance from the action edge 48 to the connecting edge 52. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
