| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device which can prevent the attachment of a coating liquid to the rear surface of a substrate by containing little mist of the coating liquid in an air flow passing along the rear surface side of the substrate. SOLUTION: When the substrate W turns and a space S becomes a decompressed state, only the pure air passes through a punching plate 8 from the peripheral edge of the substrate W and then passes in a space between a mist guard 10 and a horizontal portion 7 and then flows outward in the radial direction in a space between the top face of the horizontal portion 7 and the bottom face of the substrate W from an opening 9 for breathing. Meanwhile, excessive filamentous coating liquid scattering from the peripheral edge of the substrate W is trapped by the punching plate 8 when it passes through it, and the mist passes through the punching plate 8 but is trapped by the mist guard 10. Consequently, there is no coating liquid nor the mist contained in the air flow going toward the space between the top face of the horizontal portion 7 and the bottom face of the substrate W from the opening 9 for breathing, and therefore the coating liquid never attaches to the bottom face of the substrate W. COPYRIGHT: (C)2006,JPO&NCIPI
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