| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator having a moving element that has a high traveling speed, and to provide an imaging device. SOLUTION: The moving element is provided which can be guided by a stator to travel in the penetrating direction of a penetrating section. There is also provided a membrane at a contact area between the moving element and the stator of the moving element contacting with each other, when the moving element travels in the penetrating direction of the penetrating section. Since the membrane is installed it can lower the coefficient of friction between the support of the moving element, stator frame and a driving electrode substrate, thus increasing the traveling speed of the moving element. COPYRIGHT: (C)2006,JPO&NCIPI
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