| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly-accurate semiconductor pressure sensor which is uninfluenced even if an external force from the outer case external side surface direction is applied. SOLUTION: This semiconductor pressure sensor is equipped with a rectangular outer case wherein a section having one end face as an opening is formed to have a recessed shape, conductive members penetrating the outer case, a rectangular semiconductor pressure sensor chip for detecting a pressure and generating an electric signal corresponding to a detection level, and wires for conducting the semiconductor pressure sensor chip to the conductive members. The sensor is formed by loading the semiconductor pressure sensor chip inside the outer case in the direction wherein the pressure receiving surface of the semiconductor pressure sensor chip agrees with the opening of the outer case, and by filling a protection member in the outer case. In the sensor, each conductive member is buried in the contact state with an inner wall part of the outer case on a position facing to the center part of each side of the outer case. COPYRIGHT: (C)2006,JPO&NCIPI
|
