| 摘要 |
PROBLEM TO BE SOLVED: To realize an XY stage capable of inhibiting yawing motion without using a servo means of electronic circuit. SOLUTION: The XY stage for controlling the positions of a slider in an X-axis direction and a Y-axis direction is provided with a gyroscope means. The rotational axis of the gyroscope means is arranged in parallel to the X-axis or Y-axis direction, characteristically inhibits the yawing motion of the slider part in the X-axis direction or Y-axis direction. COPYRIGHT: (C)2006,JPO&NCIPI
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