| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle plate having a liquid-repellent film superior in liquid-repellency and durability, a highly reliable liquid droplet jet head, and a liquid droplet jet device. SOLUTION: The nozzle plate 11 is equipped with a substrate 112 having a plurality of nozzles 111 for ejecting a liquid droplet formed thereon and a liquid-repellent film 113 provided to surround at least the periphery of the nozzle 111 on a face of ejecting the liquid droplet. The liquid-repellent film 113 is formed by using a liquid repellent particle of which at least the surface is constituted of a substance including fluorine and silicon as a main material. In the case where the surface of the liquid repellent particle is measured by an X-ray photoelectron spectrographic analysis method, when an area of the obtained spectrum in the range of 92-110 eV and in the range upper than a base line connecting between a value at 87 eV and a value at 115 eV is represented by "X" and an area thereof in the range of 680-695 eV and in the range upper than a base line connecting between a value at 675 eV and a value at 700 eV is represented by "Y", the value of Y/X satisfies the relation that it is in the range of 1/50-1. COPYRIGHT: (C)2006,JPO&NCIPI
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