发明名称 Group encapsulated dicing chuck
摘要 A semiconductor wafer saw for dicing semiconductor wafers are disclosed comprising a wafer saw including variable lateral indexing capabilities and multiple blades. The wafer saw, because of its variable indexing capabilities, can dice wafers having a plurality of differently sized semiconductor devices thereon into their respective discrete components. In addition, the wafer saw with its multiple blades, some of which may be independently laterally or vertically movable relative to other blades, can more efficiently dice silicon wafers into individual semiconductor devices.
申请公布号 US2006065262(A1) 申请公布日期 2006.03.30
申请号 US20050281695 申请日期 2005.11.17
申请人 FARNWORTH WARREN M;MUNTIFERING TOM A 发明人 FARNWORTH WARREN M.;MUNTIFERING TOM A.
分类号 B28D1/04;B28D5/00;B28D5/02;H01L21/00;H01L21/301 主分类号 B28D1/04
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