WAFER TRANSFER APPARATUS AND WAFER CLEANING SYSTEM USING THIS APPARATUS,申请号KR20030083671-传众专利搜索

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发明名称	WAFER TRANSFER APPARATUS AND WAFER CLEANING SYSTEM USING THIS APPARATUS
摘要
申请公布号	KR100565433(B1)	申请公布日期	2006.03.30
申请号	KR20030083671	申请日期	2003.11.24
申请人		发明人
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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