| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for preparing a thin piece sample which accurately position a desired observation region in a sample substrate, without finely separating the sample substrate, and easily prepare a planar sample with regard to a region, at an arbitrary depth from the surface of the sample substrate. SOLUTION: The sample has a thin piece observing section, and is prepared by a sample piece extracting process of forming and intersecting a groove 6 perpendicular to the surface of the substrate and a groove 8 inclined to the surface of the substrate by irradiating the sample substrate 1 with a focused ion beam 4, and extracting a wedge sample piece 9, a process of fixing the extracted sample piece 9 on a sample holder 12, and a process of forming a thin wall 18, including the desired observation region and parallel to the surface 15 of the sample substrate 1 by irradiating the focused ion beam 4. COPYRIGHT: (C)2006,JPO&NCIPI
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