发明名称 |
TRANSMISSION ELECTRON MICROSCOPY SAMPLE PREPARATION METHOD FOR ELECTRON HOLOGRAPHY |
摘要 |
A method for preparing a transmission electron microscopy (TEM) sample for electron holography includes forming a sacrificial material over an area of interest on the sample, and polishing the sample to a desired thickness, wherein the area of interest is protected from rounding during the polishing. The sacrificial material is removed from the sample following the polishing.
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申请公布号 |
US2006065830(A1) |
申请公布日期 |
2006.03.30 |
申请号 |
US20040711690 |
申请日期 |
2004.09.30 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BAUER THOMAS A.;BOETTCHER STEVEN H.;DOMENICUCCI ANTHONY G.;GAUDIELLO JOHN G.;KIMBALL LEON J.;MCMURRAY JEFFREY S.;WANG YUN-YU |
分类号 |
G01N1/32;G01N23/04 |
主分类号 |
G01N1/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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