METHOD FOR PRODUCING A MICROFUNCTIONAL COMPOSITE DEVICE

摘要

The invention relates to a method for producing a microfunctional composite device comprising microfunctional elements which are mounted in such a way that they are adjusted in relation to each other. According to said method, a first set of the microfunctional components are formed on a first support substrate, a second set of the microfunctional components are formed on a second support substrate, the first and second support substrates are adjusted in relation to each other and the adjusted first and second support substrates are interconnected to form a microfunctional composite device. The invention is characterized in that the first support substrate is divided into joined areas and free areas by forming dividing trenches in said first support substrate. The first and second support substrates are connected in such a way that a permanent connection is produced between them in the joined areas and the free areas of the first substrate can be detached from the composite device.