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发明名称	PLASMA PROCESSING APPARATUS
摘要
申请公布号	KR100565129(B1)	申请公布日期	2006.03.30
申请号	KR20030048690	申请日期	2003.07.16
申请人		发明人
分类号	H05H1/46;B01J19/08;C23C16/511;H01J37/32;H01L21/205;H01L21/3065;H05H1/30	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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