| 发明名称 |
METHOD AND DEVICE FOR VIBRATION CONTROL |
| 摘要 |
<p>A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.</p> |
| 申请公布号 |
EP1151211(B1) |
申请公布日期 |
2006.03.29 |
| 申请号 |
EP20000905822 |
申请日期 |
2000.01.28 |
| 申请人 |
ACTIVE CONTROL EXPERTS INC. |
发明人 |
SPANGLER, RONALD;BIANCHINI, EMANUELE;PLETNER, BARUCH;MARSH, BETSY;JACQUES, ROBERT |
| 分类号 |
F16F15/00;B06B1/02;B06B1/04;B06B1/06;B06B1/08;F16F15/02;F16F15/027;G03F7/20;G05D19/02;H01L21/027;H01L21/68;H01L41/047;H01L41/053;H01L41/09;H04R17/08 |
主分类号 |
F16F15/00 |
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