发明名称 Method and device to hold and transport workpieces having flat surfaces
摘要 <p>The method involves providing a lifting apparatus (1) having a gas supply and a plane parallel holding surface (7), and moving and positioning the apparatus (1) in a direction parallel to a surface (4) of a work piece (2) in a preset distance to the work piece. A gas mixture is inserted over the supply into a space between the holding surface and the work piece, and a low pressure is generated between the surface (4) and the apparatus. Independent claims are also included for the following: (A) a lifting apparatus for performing a work piece lifting method (B) a method for lifting, holding and/or transporting and depositing a work piece (C) an apparatus for lifting, holding and/or transporting a work piece.</p>
申请公布号 EP1641037(A1) 申请公布日期 2006.03.29
申请号 EP20050020362 申请日期 2005.09.19
申请人 SINGULUS TECHNOLOGIES AG 发明人 KEMPF, STEFAN;ROHRMANN, REINER
分类号 H01L21/683;B65G47/91 主分类号 H01L21/683
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