Vapor source for coating apparatus.

摘要

Apparatus for producing thin coatings by a vacuum process from two components of different vapor pressure comprises a sputtering system (2) for the component of lower vapor pressure and a heated tank (1, 5) of granules (3) of the component of higher vapor pressure. A massive steel block (6) is fitted above the tank with a central channel (8), in which a rotating cylindrical holder (7) is mounted, with a flat section, to which the substrate (4) to be coated is attached. This allows it to be exposed to temperatures of 300 - 600 [deg] C through the channel. The block has a wedge-shaped channel in its upper side, with the wider side facing outwards, through which the substrate can be exposed to the sputtering system as the holder rotates.