| 发明名称 |
Collector for an illumination system with wavelength of 193 nm |
| 摘要 |
The lighting of micro structures uses an optical collector that is rotationally symmetrical about an axis between the light source (1) and the target (5). The collector has a number of mirror shells (40,42,44,46) set around the axis and positioned such that there is no overlapping effect |
| 申请公布号 |
EP1225481(A3) |
申请公布日期 |
2006.03.29 |
| 申请号 |
EP20010128685 |
申请日期 |
2001.12.01 |
| 申请人 |
CARL ZEISS SMT AG |
发明人 |
SINGER, WOLFGANG, DR.;WANGLER, JOHANNES;ANTONI, MARTIN |
| 分类号 |
G02B5/10;G03F7/20;G02B5/09;G02B17/06;G02B19/00;G03F1/16;G21K1/06;G21K5/00;G21K5/02;G21K5/04;H01L21/027 |
主分类号 |
G02B5/10 |
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