Method of polishing at least one face of a silicium based workpiece,申请号EP20000401691-传众专利搜索

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发明名称	Method of polishing at least one face of a silicium based workpiece
摘要
申请公布号	EP1066926(B1)	申请公布日期	2006.03.29
申请号	EP20000401691	申请日期	2000.06.15
申请人	SOCIETE EUROPEENNE DE SYSTEMES OPTIQUES S.E.S.O.	发明人	FERME, JEAN-JACQUES;GODEFROY, PHILIPPE;DAHAN, GILBERT
分类号	H01S3/08;B08B7/04;B24B37/04;H01L21/304	主分类号	H01S3/08
代理机构		代理人
主权项
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