发明名称 Semiconductor wafer, method of manufacturing the same, and method of manufacturing a semiconductor device
摘要 In a semiconductor wafer including a plurality of element forming regions formed on a front surface of a semiconductor substrate, a scribe line groove is formed along a periphery of the each of the element forming regions, and stoppers are located at an intersection of the scribe line groove, so as to block the scribe line groove.
申请公布号 EP1580806(A3) 申请公布日期 2006.03.29
申请号 EP20040029452 申请日期 2004.12.13
申请人 NEC ELECTRONICS CORPORATION 发明人 ONUMA, MANABU
分类号 H01L21/78;G03F1/00;G03F1/70;H01L21/301 主分类号 H01L21/78
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