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发明名称
VERFAHREN ZUM HERSTELLEN VON HALBLEITERBAUELEMENTEN UNTER VERWENDUNG EINER MASKE MIT EINEM FEINEN MARKIERUNGSMUSTER
摘要
申请公布号
DE1908901(B2)
申请公布日期
1976.12.09
申请号
DE19691908901
申请日期
1969.02.22
申请人
发明人
分类号
H01L21/00;H01L21/316;H01L23/485;H01L29/00;(IPC1-7):H01L21/308;C23F1/02
主分类号
H01L21/00
代理机构
代理人
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