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发明名称
TUNING A SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM
摘要
申请公布号
EP1116011(B1)
申请公布日期
2006.03.29
申请号
EP19990942198
申请日期
1999.08.13
申请人
APPLIED MATERIALS, INC.
发明人
ADERHOLD, WOLFGANG;MAYUR, ABHILASH, J.;KNOOT, PETER, A.
分类号
G01J5/00;G01K15/00;G01J5/10;H01L21/26;H01L21/66
主分类号
G01J5/00
代理机构
代理人
主权项
地址
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