| 发明名称 |
SEMICONDUCTOR DEVICE WITH BUILT-IN LIGHT RECEIVING ELEMENT, PRODUCTION METHOD THEREOF, AND OPTICAL PICKUP INCORPORATING THE SAME |
| 摘要 |
<p>A method for producing a semiconductor device with a built-in light receiving element is provided. The device comprises a light receiving element region for receiving and converting an optical signal to an electric signal, the light receiving element region being provided on a substrate. The method comprises the steps forming an anti-reflection film in the light receiving element region on the substrate, and forming a protection film, the protection film serving as an etch stop film in a subsequent etching step.</p> |
| 申请公布号 |
KR100564266(B1) |
申请公布日期 |
2006.03.29 |
| 申请号 |
KR20030015162 |
申请日期 |
2003.03.11 |
| 申请人 |
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发明人 |
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| 分类号 |
H01L27/14;H01L31/10;H01L21/00;H01L21/8222;H01L23/58;H01L27/06;H01L27/144;H01L31/00;H01L31/103;H01L31/109;H01L31/18 |
主分类号 |
H01L27/14 |
| 代理机构 |
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代理人 |
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