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发明名称
CLEANING OF SEMICONDUCTOR
摘要
申请公布号
JPS5264870(A)
申请公布日期
1977.05.28
申请号
JP19750140724
申请日期
1975.11.26
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
MURAOKA HISASHI;ASANO MASAFUMI;OOHASHI TAIZOU;SHIMAZAKI YUUZOU
分类号
C23F1/10;C23G1/14;C23G3/00;H01L21/306;H01L21/308
主分类号
C23F1/10
代理机构
代理人
主权项
地址
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