发明名称 Optical probe for wafer testing
摘要 A first optical probe is used to test a planar lightwave circuit. In one embodiment, a second probe is used in combination with the first probe to test the planar lightwave circuit by sending and receiving a light beam through the planar lightwave circuit.
申请公布号 US7020363(B2) 申请公布日期 2006.03.28
申请号 US20010040398 申请日期 2001.12.28
申请人 INTEL CORPORATION 发明人 JOHANNESSEN KJETIL
分类号 G02B6/34;G02B6/10;G02B6/12;G02B6/24;G02B6/26;G02B6/28;G02B6/30 主分类号 G02B6/34
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