发明名称 |
Intelligent modelling of process and tool health |
摘要 |
The health of a tool is predicted based on temporally ordered input data representing parameters indicative of tool health. A sliding time window is used to partition input data into temporally displaced data sets. Non-linear regression models determine, based on the data sets, a set of predictive values relating to tool health at a future time. A tool-health metric is then determined based on one or more of the predictive values.
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申请公布号 |
US7020569(B2) |
申请公布日期 |
2006.03.28 |
申请号 |
US20040801064 |
申请日期 |
2004.03.15 |
申请人 |
IBEX PROCESS TECHNOLOGY, INC. |
发明人 |
CAO AN;CHAN WAI T.;CARD JILL P. |
分类号 |
G06F19/00;G05B23/02 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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地址 |
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