| 摘要 |
An inspection microscope ( 1 ) having a light source ( 3 ) that emits light of a first wavelength below 400 nm for illumination of a specimen ( 13 ) to be inspected, and having an objective ( 11 ) that is composed of multiple optical components and has a numerical aperture and a focal length, and having a tube optical system ( 21 ) and an autofocus device ( 25 ) that directs light of a second wavelength onto the specimen ( 13 ), is disclosed. The inspection microscope ( 1 ) is characterized by the objective ( 11 ), which has an optical correction that eliminates the longitudinal chromatic aberrations with respect to the first and the second wavelength and whose optical components are assembled in cement-free fashion, the second wavelength being greater than 400 nm.
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