Brittle Material Transfer Apparatus using Linear Motor,申请号KR20040054776-传众专利搜索

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发明名称	Brittle Material Transfer Apparatus using Linear Motor
摘要
申请公布号	KR100563837(B1)	申请公布日期	2006.03.28
申请号	KR20040054776	申请日期	2004.07.14
申请人		发明人
分类号	H01L21/68;H01L21/677;H01L21/683	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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