Method for fabricating via plug,申请号KR20030095765-传众专利搜索

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发明名称	Method for fabricating via plug
摘要
申请公布号	KR100564803(B1)	申请公布日期	2006.03.28
申请号	KR20030095765	申请日期	2003.12.23
申请人		发明人
分类号	H01L21/283	主分类号	H01L21/283
代理机构		代理人
主权项
地址

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