Tool For Baffle Plate Of Plasma Etching Chamber,申请号KR20030053475-传众专利搜索

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发明名称	Tool For Baffle Plate Of Plasma Etching Chamber
摘要
申请公布号	KR100563818(B1)	申请公布日期	2006.03.28
申请号	KR20030053475	申请日期	2003.08.01
申请人		发明人
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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