发明名称 Dual work function gate electrodes
摘要 Methods of manufacturing transistor gate electrodes including, in one embodiment, forming a metal layer over first and second regions of a substrate, wherein the first and second regions have different first and second dopant types, respectively. A semiconductor layer is formed over at least a portion of the second region. The metal layer is heated to form a metal gate electrode over the first region, and the metal layer and the semiconductor layer are collectively heated to form a composite metal gate electrode over the second region.
申请公布号 US7018883(B2) 申请公布日期 2006.03.28
申请号 US20040839430 申请日期 2004.05.05
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 WANG CHIH-HAO;LI TZUNG-LIN;WANG YEN-PING;CHANG CHUN-YEN
分类号 H01L21/8238;H01L21/8234 主分类号 H01L21/8238
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