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发明名称
Device with low-k dielectric in close proximity thereto and its method of fabrication
摘要
申请公布号
SG120142(A1)
申请公布日期
2006.03.28
申请号
SG20040000595
申请日期
2004.01.14
申请人
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
发明人
CHENMING HU;DENNY TANG;TSENG HORNG-HUEI
分类号
H01L21/336;H01L21/44;H01L21/768;H01L29/78
主分类号
H01L21/336
代理机构
代理人
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