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发明名称
Method for fabricating semiconductor
摘要
申请公布号
KR100564801(B1)
申请公布日期
2006.03.28
申请号
KR20030100991
申请日期
2003.12.30
申请人
发明人
分类号
H01L21/28;H01L21/3205;H01L21/44;H01L21/768;H01L23/48;H01L23/52;H01L23/522;H01L29/40
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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