DEVICE AND METHOD FOR SURFACE TREATMENT SUCH AS PLASMA TREATMENT

摘要

[PROBLEM] To effectively perform surface treatment of a large-area object even when a surface treatment device has short holes such as slits through which a treatment gas is blown against a surface of the object. [MEANS FOR SOLVING THE PROBLEM] A processing section (1) of a plasma surface treatment device (M) has a plurality of electrode plates (11, 12) arranged side by side. Between adjacent electrode plates, a slit-shaped hole (10a) is formed. A plurality of holes (10a) arranged side by side constitute a hole group (100). A work (W) to be treated is moved in the direction of the extension of the slits (10a) by a moving mechanism (4).